Invalidity dossier

US 5980025

Thermal inkjet printhead with increased resistance control and method for making the printhead

Current assignee: Xerox Corp

Added 9/23/2026, 9:02:21 PM

At a glanceNo PTAB challengesNo litigation on file

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Patent summary

Title, assignee, inventors, filing/issue dates, abstract, and a plain-language overview of the claims.

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Patent Overview: US 5,980,025

Title: Thermal inkjet printhead with increased resistance control and method for making the printhead

Patent Number: US5980025A
Application Number: US08/976,419
Inventors: Cathie J. Burke; Alan D. Raisanen
Assignee: Xerox Corp (original and current assignee listed)
Priority/Filing Date: 1997-11-21
Publication (Grant) Date: 1999-11-09

Purpose

The invention relates generally to thermal ink jet printing and, more particularly, to printheads with polysilicon resistive heaters provided with improved resistance control.

Plain-Language Scope

The patent addresses a problem in prior-art thermal inkjet printheads: a silicon nitride layer (17), typically deposited by LPCVD, can have high compressive stress (up to 6×10⁸ dynes/cm²). This stressed layer applies mechanical strain to the underlying polysilicon heater (34), causing resistivity changes via piezoresistive effects and dopant redistribution.

The disclosed solution: a thin buffer oxide film is deposited over the polysilicon heater elements, followed by a thinner-than-normal silicon nitride layer, then a glass oxide composite layer. Because the nitride is a continuous blanket layer beneath the glass, the quality of the nitride-to-glass seal becomes less critical—any ink infiltrating past that seal is stopped at the continuous nitride film.

The printhead includes a plurality of ink-filled channels in thermal connection with a resistor heater section. The resistor array comprises a first moderately-doped n+ polysilicon layer with a buffer oxide layer overlying it, passivation means for thermal isolation and ink erosion protection, and electrical circuits providing input drive signals. A method for fabricating the printhead is also claimed.

What the Excerpt Does Not Establish

The supplied text is an excerpt. It does not reproduce the full claims, the complete fabrication method steps, detailed process parameters, or the full specification. It also does not establish the actual legal scope, prosecution history, or any findings regarding the incorporated references (U.S. Pat. Re. Nos. 32,572; 4,774,530; 4,951,063).

Source: https://patents.google.com/patent/US5980025/en

Generated 10/1/2026, 9:41:00 PM

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Proceedings on file (0)

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PTAB challenges

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Assignment history

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Prior art

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Obviousness

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Extensions

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Derivative works

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