Inpria Corp

Inpria Corp, also known as Inpria Corporation, is a semiconductor materials company headquartered in Corvallis, Oregon, United States. Founded in 2007 as a spin-out from Oregon State University, Inpria was acquired by the Japanese multinational JSR Corporation in October 2021 for $514 million, making it a wholly-owned subsidiary. JSR itself is currently subject to a planned $6.4 billion acquisition by Japan Investment Corporation. Inpria operates with an estimated employee count ranging from approximately 50 to 102.

Inpria specializes in the design, development, and manufacturing of Extreme Ultraviolet (EUV) metal oxide photoresists. These advanced materials are critical for nanoscale patterning in the fabrication of advanced semiconductor chips, enabling higher resolution, smaller feature sizes, and improved performance in devices like next-generation DRAM. The company's proprietary technology utilizes organometallic clusters with a tin-oxide core, offering distinct advantages over traditional polymer-based photoresists, including enhanced etch selectivity and simplified manufacturing flows. Inpria manufactures its EUV photoresists in its Corvallis, Oregon facility and collaborates with major semiconductor manufacturers like SK hynix on co-development efforts.

Inpria demonstrates an active patent litigation posture as an operating company. While tracked data shows one case where Inpria is a defendant, court records indicate Inpria has also acted as a plaintiff. In October 2022, Inpria filed a patent infringement lawsuit against Lam Research Corporation in the U.S. District Court for the District of Delaware, alleging unauthorized use of its metal oxide photoresist technology. This case was later dismissed without prejudice in September 2025.

The company is currently involved in a single tracked case as a defendant, Unified Patents LLC v. Inpria Corp, initiated in 2025 before the Patent Trial and Appeal Board (PTAB). This type of proceeding typically involves a challenge to the validity of an existing patent, which is common for operating companies with valuable intellectual property. Additionally, Inpria, along with its parent JSR Corporation, is a defendant in an inventorship and contract dispute filed in January 2024 by The Research Foundation for the State University of New York, concerning 25 patents related to semiconductor technology.